According to an embodiment, the method of manufacturing a thin film transistor array panel includes forming a gate wire, a data wire, and a thin film transistor on a substrate and depositing an organic material layer on the gate wire, the data wire, and the thin film transistor. 5decan-2-one, represented by Formula I, which are suitable for forming into a tablet dosage form, as well as tablet dosage forms are disclosed. Each air modulator has an array of openings including a number of openings, which are arranged next to one another along an essentially straight line. The apparatus has at least one first beamforming element, which is held by a holding unit.