In a defect inspection apparatus which combines a plurality of probes for measuring electric properties of a specimen including a fine circuit line pattern with a charged particle beam apparatus, the charged particle beam apparatus reduces a degradation in resolution even with an image-shift of \xb175 \u03bcm or more. The mount has a base platform having an upper planar face and a lower open face and at least one sidewall, at least one magnet coupled between the upper planar portion and lower open face, and proximate an end of the sidewall, a release bar coupled to a release mechanism, the release bar having a plurality of positions. The image processing apparatus displays the first image and the second image on a display unit if the display mode of the image processing apparatus is the first display mode. Second ends of the handles are pivotally connected.