1460989726-e4c8106a-02cd-4b2d-b50c-02361a4938bd

In a center bearing support, a plurality of bored portions corresponding to spaces passing through a rubber-like elastic body in an axial direction are provided around a shaft hole. The first system may establish a direct wireless communication link with the second system that does not connect through any intermediate system between the first system and the second system. A reticle pod available for transporting the reticle is autonomously identified using the computing device.