A method of forming a dielectric between memory cells in a device includes forming multiple memory cells, where a gap is formed between each of the multiple memory cells. In a combined mode, the controller causes the generator to deliver both first and second RF waveforms, the controller including means for feeding the waveforms to the output connections such that the first RF waveform is delivered between a first pair of the output connections, and the second RF waveform is delivered between a second pair of the output connections. Due to proper surface and wafer flat orientations in each semiconductor layers of the hybrid substrate, all gates of the devices are oriented in the same direction and all channels are located on the high mobility surface. The first and second ends are movable away from each other to apply a radially outwardly directed force to the inner surface of the cannula and cause expansion of the cannula.