The present invention relates to a process by which whey permeates or blends thereof can be converted to a modified whey powder having low mineral content, low hygroscopicity, and advantageous organoleptic properties using a combination of ion-exchange demineralization and crystallization. The process chamber includes a chamber body, a substrate support pedestal, a pump port and a gas injection funnel. The materials of the carrier and the first dielectric layer are selected to prevent the IC integrated substrate from peeling off the carrier during processing and to allow the IC integrated substrate to naturally separate from the carrier after being cut, through the adhesion between the carrier and the first dielectric layer.