The instant invention is directed to a process employing slurry catalyst compositions in the upgrading of heavy oils. Each of the emitters includes a titanium silicide nitride outer layer so that the emitters are less susceptible to degradation. The rod and casing mill end are then rotated until the casing mill end substantially forms a perforation in the well casing. When the bottom electrode is a semiconductor film, the intermediate layer comprises a second metal film and an oxide film or a sulfide film on the second metal film. The main feature of the method according to the invention is that the precursor is evaporated in a controlled manner so as to provide a pulse supply of precursor having a constant composition to the inside of a tubular furnace which can be arranged in a vertical position for the continuous production of nanomaterials or in a horizontal position for batch production. The central processing unit and the interface cooperate to give the electronic processing unit.