A multi-nozzle gas spray arm for a spin coating apparatus. An elongated string terminating in spaced-apart ends is wound around the structure. The plurality of balls include at least one bump having a core material and an outer layer.
Algorithmically generated prior art
A multi-nozzle gas spray arm for a spin coating apparatus. An elongated string terminating in spaced-apart ends is wound around the structure. The plurality of balls include at least one bump having a core material and an outer layer.