In a charged particle beam lens according to the present invention, the orientations of through-holes formed in electrodes and precision of forming the through-holes are determined in accordance with the degree of influences of the surfaces of the electrodes on the aberration of the lens. The rigging uses a character body that moves along a path or freely as needed. The laser beams are further aggregated to a fiber-optic cable H3 and distributed to a branch fiber-optic cable HH1 by the laser beam outlet OP1, and then distributed by laser beam outlet OP2 to OP8 to branch fiber-optic cables HH2 to HH8. The top surface is connected with the lateral surface. The rotation of the substrate is accelerated in a period from a time point t6 to a time point t7, and the rotation speed of the substrate attains a second speed at the time point t7.