A liquid immersion member is used in a liquid immersion exposure apparatus which exposes a substrate by exposure light via a first liquid between an emitting surface of an optical member and the substrate, and is capable of forming a liquid immersion space on an object movable below the optical member. One or more fuel cell power plants provide one substantially continuous source of power, and a utility grid provides another source of power. The monolithic body includes a first reflector disposed on the first end, a second reflector disposed on the second end, and a solid state gain medium and a Q-switch disposed between the first reflector and the second reflector. A motion amount calculation unit calculates a final motion amount based on the inter-field motion amount estimated by the inter-field motion-estimating unit and the intra-field motion amount estimated by the intra-field motion-estimating unit, and then outputs the motion amount.