When a major failure is detected, display of a measurement value on a display section is stopped, and instead of the measurement value, an abnormal code, which indicates the contents of the major failure, is displayed on the display section. Another embodiment of the present invention addresses the loss of die per wafer due to increased scribe area when using LVR and HVR reticles in the same set. The first wire line, in a state with the first liquid container installed in the container installation portion, electrically connects to the first electrical device.