Embodiments of the present invention disclose a bended liquid crystal display and a manufacturing method and apparatus therefore. Each heat pipe has an evaporator end disposed within the portion of the frame that defines the motor portion and a condenser end disposed within the portion of the frame that defines the cooling portion. Each lithography element also comprises a cluster front-end for interface to an operator or host system. According to the above, it is possible to provide a small photocathode high-frequency electron-gun cavity apparatus capable of generating a high-strength and high-quality electron beam. Optionally one or more of the plurality of cells has at least two cell walls each having an aperture at the same position in the common direction. A dose distribution that is non-uniform within the plane of the substrate is formed within the plane of the substrate by changing at least one of a scanning speed of the ion beam and a driving speed of the substrate within an area where the ion beam is incident on the substrate.