A pivot mechanism includes a pivot arm that is rotatably mounted on a base member via a pivot pin. In a split gate type nonvolatile memory in which memory gate electrodes are formed in the shape of sidewalls of control gate electrodes, it is possible to produce a memory chip having a memory of a high operation speed and a high rewrite cycle and a memory of high reliability at a low cost by jointly loading memory cells having different memory gate lengths in an identical chip. The apparatus also includes a fluid source coupled to the inlet to transmit fluid into the passage.