An image processing type aligner enables proper set-up of one of two optical adjustment elements used to align an adaptive cruise control sensor or the like mounted on a vehicle. The MOSFET devices include a ground plane formed of a monocrystalline Si based material. Methods of forming XeF2 by reacting Xe with a fluorine containing chemical are also provided, where the fluorine containing chemical is selected from the group consisting of F2, NF3, C2F6, CF4, C3F8, SF6, a plasma containing F atoms generated from an upstream plasma generator and mixtures thereof. When the requested actuation is out of the permitted range of the second valve actuation, the second computing portion corrects the target actuation of the first valve based on the margin between the requested actuation and a limit of the permitted range. In another embodiment, the matrix material is based on lanthanum iodide alone, which must be substantially free of lanthanum oxyiodide.