A planetary multi-substrate holder system for material deposition includes a substrate holder having circumferentially shaped openings in which disk-like substrates of a smaller diameter than the diameter of the openings are maintained. The linker group is such that the chelator is mono-functionalized at the bridgehead position and provides both flexibility and a lack or aryl groups, to minimize lipophilicity and steric hulk. The power supplies supply approximately the same voltage, but the output voltages are typically not exactly equal. The second additional byte code instruction causes a second output function to be executed for the method as a consequence of the exit point being reached during runtime.