A compact matching network couples an RF power supply to an RF antenna in a plasma generator. The back side of the wafer is polished after performing the back grinding step, thereby removing a grinding strain, and a silicon nitride film is formed on the back side of the wafer. The top wall is provided with a plurality of apertures to permit the flow of liquid into and out of the volume. Hence, the network switch performs Internet Protocol switching for intranetwork traffic, improving efficiency of the router by enabling the router resources to support more subnetworks. Further, when a rotary load greater than frictional resistance of the O-ring 4 is applied at the feeding limit, the cartridge 2 and the container body 3 begin to make relative rotations so that no further overload greater than the rotary load is applied to the feeding mechanism. A mobile client in communication with one or more servers of an LBS system includes one or more mobile communication devices and one or more GPS devices for establishing a position of the client.