Integrated systems, apparatus, software, and methods for performing biochemical analysis, including DNA sequencing, genomic screening, purification of nucleic acids and other biological components and drug screening are provided. The package has a miniature frame substrate made of a material selected from the group including: ceramic, metal and a combination of ceramic and metal. Within the balloon is a first expandable diaphragm, one end of which is attached to the inner tube. The voltage stress of some components will therefore be lower.