A toolbox security frame includes a lower frame that may be placed within a cage with a rear member of the lower frame extending therefrom. The vibration plate has a first oxide film formed on the one surface of a passage-forming substrate 10, and a second oxide film formed on the first oxide film 50 by use of a sputtering method. Further, a display device is aligned along an optical axis in common with the camera eliminating parallax between the display and camera. Each of a plurality of heat shield devices includes a heat reflector plate that is movable in response to a controller to advance the heat reflector plate in front of a scavenger opening to prevent excessive heating in the boat loading region during wafer boat loadingunloading operations.