A stage configuration is provided, wherein a ceramic plate is used as the z-stage body to decrease the use of the metal plates in the conventional configuration, so that the compact structure of the z-stage may decrease the vibrational movements of the z-stage. A series of order entry screens are downloaded to a remote customer’s computer, typically via an internet connection. The exclusive logical sum of the delayed signal and the divided clock signal in the frequency-doubling portion doubles the frequency. The fluid supply portion supplies a fluid into a space formed by the fixture and balloon member.