A wall film can form around a temperature sensor as a result of the temperature sensor being fitted in the intake port of the internal combustion engine, in such a manner that at least some of the fuel jet from the injection valve is sprayed onto it. The torsional MEM switch is characterized by having its control electrodes substantially perpendicular to the switching electrodes. A resonant section receives the signals from the input section in order to generate a resonant signal. To reduce the word size of the digital signal an open loop normalization technique can be applied. Generally, the steeper the depression wall, the more strength is provided to the structure.