Semiconductor processing equipment includes a transfer chamber having a plurality of transfer ports arranged at different positions in a lateral direction. to form a tantalum precursor gas and exposing the substrate to a continuous flow of a carrier gas during an atomic layer deposition process. Remainders are calculated using the floating point numbers divided, the unit of least precision, and the unit of least precision plus one to determine where the infinitely precise result is with respect to the digital representation of the estimated quotient. The circuit, in response to a de-allocation request to de-allocate a certain size of memory, de-allocates whole unused address blocks and memory blocks.