A phototherapy light device for directing light onto an infant. In that embodiment, reference and adjustment patterns are formed to be juxtaposed in a nozzle array direction to detect a position shift between patterns in the main scanning direction. The method may also comprise depositing a metal oxide on the target in the process chamber to form a thin film having enhanced optical properties without substantially decreasing electrical quality. In one embodiment, the source further includes a silicon layer between the metal nitride layer and the channel. The switching circuit maintains each of the share line voltages equally at an intermediate voltage level that is between the share line voltages.