A defect inspection apparatus for inspecting a defect of a substrate as an object to be inspected comprises an illumination optical system for illuminating the substrate, a receiving optical system for receiving diffracted light from the substrate and a polarizing element provided in either one of the illumination optical system or the receiving optical system. The routing unit receives a packet from each port, and uses header information contained in the packet to judge whether the packet should be transmitted to the function unit. Compounds of the present invention have the following formula:. Based on the stored information, a printer driver corresponding to an identifier that identifies a printing apparatus entered in the received electronic mail is identified as a printer driver to be used. The woven synthetic fabric is chemically finished with continuous dyeing process.