An instruction is provided to perform clearing of selected address translation buffer entries associated with a particular address space, such as segments of storage or regions of storage. Communication between the subsections is accomplished with wireless transceivers transmitting over the air gap interface separating the subsections. The annealing is performed at a temperature below the melting point of the wafer so that no significant dopant redistribution occurs during the annealing process. The system also has a fiber remover which removes fibers deposited along the exterior surface of the datum. In preferred embodiment of the profilometer, a single light beam is engineered to propagate in two orthogonal planes of incidence so that it becomes sensitive to heightlevel change on the wafer while being insensitive to local slope or wafer tilt.