1460752502-5460cce8-3709-4ab0-804f-24cf736c8d8c

An article storage facility includes a storage rack configured to store a semiconductor wafer and a reticle, and a storage and retrieval transport apparatus. A treatment tank, connected to the holding tank by a first pipe, is used for treating the initially processed sewage from the holding tank to ensure optimal pH, percent of solids, and electrical conductivity of the sewage. The outlet has an aperture controlled by a movable valve having an open position when the crewmember breathes out and a closed position when the crewmember breathes in.