1460798723-79d53b23-88ee-46f3-b087-1ba831fede52

A tool module comprises an elongate carrying plate, an axle located with respect to the carrying plate towards one end of the said plate and a tool blade rotatable around the axle to move from a stowed position to a use position. A transmitter and receiver for performing this method are as well disclosed. The wafers may be loaded in the horizontal processing position as well as the vertical processing position.