A method of forming a semiconductor thin-film constitutes an alignment mark in a laser annealing process. As a consequence, there is fear that water on the upper surface of the cover enters onto the upper surface of a case from a gap between the opening and the part reception section. Where two XML documents are at different locations, the join-selection elements can be transmitted from a first location to a second location. The clock control device includes a frequency processing unit and a transmission clock generating unit. A free working distance control system increases the spacing between the lens array and the substrate in response to detection of a particle.