Systems and methods generate a business process control chart and process report card. According to the present invention, it is possible to control the atmosphere outside the casing to restrict the atmosphere from flowing into the casing, which restricts the temperature of the substrate in the processing unit from partially varying and the temperature distribution from becoming ununiform within a plane of the substrate. A quantization unit applies quantization processing to the extracted region of interest and different quantization processing to other regions, and an encoder encodes the quantized image signal.