A control station apparatus performs wireless communication with a plurality of communication apparatuses and sends data to the communication apparatuses. A chemical liquid, a pure water and a gas can be supplied into a nozzle hole through opening-closing valves, and the chemical liquid and the pure water remaining inside the nozzle hole can be sucked by a sucking device. Each of the first and second additively manufactured phase coils includes of a plurality of conductive strands. The first confidence weighting is independent of the second comparison measure.