A nitride layer of the gate mask for the semiconductor device is deposited at a temperature higher than 750 deg. At first images and reports are analyzed by respective parser units to detect both structures and text passages that are related to respective structures and text passages of a knowledge data-base. A holding unit that is supported by the other end of the arm and sucks and holds an upper surface of a substrate, a rotational driving device makes the holding unit pivot on the support shaft as a center of rotation, and a posture holding mechanism keeps the pivoting holding unit in a fixed posture in horizontal directions. The cylinder wall around the internal bore is of a generally uniform thickness and circumscribed by cooling fins such that the cylinder resists bore distortion during operation.