1459990695-05fa99b5-7cfb-4166-be9e-6a74aac984b5

Apparatuses are provided for cleaning a processing component using megasonic energy including megasonic tanks, scanning megasonic plates, megasonic jets, and megasonic sweeping beams etc. There is included a hollow spinner cone made of a non-anodic material and the spinner cone has at least one perforation in its outer peripheral surface. Optional programmable registers may store the results of the tests. A housing or stop is inserted into the distal end of the lumen. The front wall may include a top wall, a bottom wall, and two side legs.