A digital phase-locked loop and a digital phase-frequency detector thereof are provided. In one embodiment, the integrated circuit comprises logic blocks and a measurement circuit. Afterwards the semiconductor material is etched to the depth of the etch stop layer, the etch stop layer acting as an etch stop such that reaching an interface between the semiconductor material and the etch stop layer is detected during the etching and the etching is stopped depending on the detection. Frustraconical cam surfaces are used to divide axially directed forces from the mold press movement into radial force components and axial force components for causing corresponding radial movements and axial movements during the two stage movement. The hydrogen containing stream can be a reformed hydrocarbon stream andor an input stream previously exposed to a water gas shift catalyst.