In a composition for etching silicon oxide, and a method of forming a contact hole using the composition, the composition which includes from about 0. The suction body has a contact surface abutting the work pieces with prevailing vacuum in the vacuum chamber. A basic waveform periodically exists in a repeated manner in the discharge period, and the discharge is not performed in the undischarged period. The draw-out portion is electrically connected to an associated one of the pin terminals. The present invention is also directed to an automated method for manufacturing the above RFID tag, such a method involving, in one embodiment, feeding a continuous supply of RF inlays into a cross-head extruder to yield a continuously extruded block and then cutting the block between successive antennae to yield a plurality of individual RFID tags. A current passes through the second current path.