A photolithographic fabrication method for a microstructure on a substrate, in particular interconnects of a DRAM, includes a first exposure with at least one alternating phase mask. The actuator includes a housing having a channel therein, the channel having at least a first inclined surface. The memory cell being examined is connected with the drain wired to a positive voltage between about 1 to 2 volts. A humidifier added in the coolant loop and the inlet oxidant stream serves to relatively increase the humidification of the inlet air while removing heat from the coolant prior to entering the CSA. In an alternative embodiment, an interpolating function is constructed using prolate spheroidal wave functions by adopting Gaussian quadrature points corresponding to a family of PSWFs as interpolation points. The display device comprises a plurality of multi-sided, rotatable display elements, each side or panel bearing a visual image.